How Are Gases Used in Electronics?

Recent trends in electronics, such as growth in the memory integrated circuits segment, the increased adoption of electric vehicles, and more initiatives to enhance regional self-sufficiency, have contributed to the indispensability of semiconductors in everyday life.

With this massive growth, having a reliable source of high-purity gases is nonnegotiable. Learn more about which gases are essential for semiconductor fabrication and where to source high-quality gases for electronics.

Why Gases Are Critical in the Electronics and Semiconductor Industries

Without gases, there would be no semiconductors, and without semiconductors, modern electronics would look very different. Gases help ensure semiconductor devices offer high performance by enabling precise control over chemical reactions and material properties. Gases are used in the following processes:

• Deposition: A thin film is applied to a wafer to give the wafer electrical characteristics. Physical vapor deposition involves metal films, while chemical vapor deposition (CVD) uses chemicals in their vapor form to coat materials. Plasma-enhanced CVD uses plasma (ionized gas), allowing for higher deposition rates and lower deposition temperatures.
• Photolithography: This process uses light to transfer patterns onto wafers. The wafer is coated with a light-sensitive material called a photoresist, and a mask containing the right pattern is placed over the wafer. Light shines through the mask to reveal the pattern on the wafer, and the pattern that remains on the coating can be used as a mask for etching.
• Etching: During the etching process, material is selectively removed from the thin film, leaving behind a pattern on the substrate. Gases involving carbon and fluorine, such as carbon tetrafluoride and sulfur hexafluoride, are commonly used for etching silicon materials, while chlorine and hydrogen fluoride are beneficial for metallic materials. A plasma-based etching process allows for more precise control.
• Doping: Imparting controlled impurities onto the wafer allows the semiconductor to conduct electricity precisely. Dopant gases contain elements like arsenic and boron, and doping creates an imbalance where electrons bounce between the semiconductor host and the impurity atoms. 
• Purging: Purging requires inert gases. During the purging process, inert gases displace other gases to prevent unwanted reactions and contaminants during semiconductor manufacturing. Semiconductors are extremely sensitive to moisture and oxidation, and inert gases provide a dry environment for silicon wafer processing. Atmospheric gases are most helpful during this process.
• Plasma cleaning: Plasma cleaning involves removing particles and residue from wafers and equipment. The process works by creating ions that interact with the material on the surface being cleaned. The resulting reaction can remove contaminants from the surface.

Here’s a quick, nonexhaustive breakdown of which gases can support these processes.

Process	Gas Type
Deposition	Germane and ammonia
Photolithography	Argon, nitrogen, helium, carbon dioxide and hydrogen
Etching	Chlorine and fluorine compounds
Doping	Phosphine and arsine
Purging	Nitrogen, argon and helium
Plasma Cleaning	Oxygen and hydrogen

Everything from computers and cellphones to advanced healthcare equipment depends on semiconductors, and none of it would be possible without reliable access to high-purity gases. You can source yours from Meritus Gas Partners. Through our nationwide network of partners, we can help connect you with a reliable distributor.

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Common Electronics and Semiconductor Fabrication Gases

Explore more about the most common gases used in semiconductor fabrication.

1. Nitrogen

Nitrogen for semiconductor manufacturing is used throughout the fabrication process, especially for purging. It keeps surfaces free from contaminants like water vapor that may impact the fabrication process. Nitrogen is passed through piping networks to displace reactive oxygen and moisture from the silicon semiconductor wafers. Because it’s a core part of the process and readily available, many semiconductor fabrication plants (fabs) keep nitrogen generators on-site. 

2. Argon

Argon is a noble gas, which means it’s incredibly chemically inert and resistant to chemical reactions. Like nitrogen, it protects silicon crystals from reacting with water vapor, oxygen and other gases. Argon is an effective option in cases where nitrogen is too reactive. Argon is also fairly easy to ionize, so it’s often used as a plasma gas for etching and deposition reactions. 

3. Helium

Like argon, helium is a noble gas. It’s also highly thermally conductive, so in addition to protecting components from unwanted chemical reactions and aiding with photolithography, it can prevent thermal damage.

4. Oxygen

Oxygen is used during the deposition, etching and cleaning processes, but it’s most effective when neutralizing reactive gases. Oxygen for semiconductor fabs is directed through abatement equipment to purge the system of reactive by-products. Similar to nitrogen and the noble gases, it prevents contamination.

5. Hydrogen

Hydrogen is used during the cleaning, etching and doping processes. While hydrogen is the most abundant element in the universe, harnessing it for practical applications like semiconductor fabrication is challenging. Innovations like green hydrogen can help. Green hydrogen production involves using a renewable source like wind to remove hydrogen molecules from water. This process produces very low carbon emissions, making it more sustainable to generate hydrogen.

Explore Electronics Gases

Using Specialty Gases to Ensure Purity Levels and Quality Control

Gases used for semiconductor fabrication must have high purity, which means standard gases aren’t suitable. Specialty gases are high-purity chemical compounds that enhance efficiency and precision in specific processes. The general principle for determining purity is counting the number of nines in the purity percentage. For example, helium with 99.9999% purity is Grade 6. Grade 4.8, then, has a purity of 99.998% — four nines and one eight.

Specialty gases for electronics and semiconductor fabrication should be at least Grade 5 — 99.999% pure. These ultra-high-purity (UHP) gases help prevent contamination that can compromise the final product.

Source Your Specialty Gases From Meritus Gas Partners

Are you searching for specialty gases for your electronics products? Meritus Gas Partners offers a range of UHP gases to suit your semiconductor needs, including:

• Argon: Purity levels up to 99.999%.
• Nitrogen: Purity levels up to 99.999%.
• Helium: Purity levels up to 99.9999%. 

We also offer pure oxygen and hydrogen, as well as specialty gas mixtures to meet your business’s specific industrial needs. We adhere to strict quality assurance protocols to ensure effectiveness and purity. When you purchase pure specialty gases from our wide network of partners, you can benefit from expert advice, timely deliveries and exceptional customer support. 

Meritus Gas Partners is building a national group of gas distributors. Learn more about our partners and our solutions for the electronics manufacturing industry, or contact one of our experts today!